Consumable Approaches of Polysilicon MEMS CMP
نویسندگان
چکیده
منابع مشابه
Optimization of CMP from the Viewpoint of Consumable Effects
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Kearney of Sandia National Laboratories for the opportunity to work on this project and experience the complete research process. Without their continuous guidance and financial support throughout the process, I would not have been able to achieve my goal of a graduate degree in mechanical engineering. In addition, I would like to thank Dr. Zhuomin Zhang for serving on the thesis reading commit...
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ژورنال
عنوان ژورنال: Transactions on Electrical and Electronic Materials
سال: 2006
ISSN: 1229-7607
DOI: 10.4313/teem.2006.7.4.157